| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the size of a substrate stage without deteriorating the substrate exchanging ability of the stage. SOLUTION: At the time of exchanging a treated substrate W with an untreated substrate W, a center-up 12 moves the treated substrate W to a delivering position (at the position of the virtual line in the figure) on the outside of a holder 9 from the center position of the holder 9 while, for example, the treated substrate W stops at a treating position and delivers the treated substrate W to a transfer arm 50 and, at the same time, receives the untreated substrate W from the arm 50 at the same position. After receiving the untreated substrate W, the center-up 12 moves the received untreated substrate W to the center of the holder 9. Since the substrate exchange can be performed regardless of the movement of a stage, the stage is not required to move for exchanging substrates except the movement within the extent required to perform its original treatment. Therefore, the size and the weight of the stage can be reduced.</p> |
