LIQUID CRYSTAL PANNEL SUBSTRATE, LIQUID CRYSTAL PANNEL USING THE SAME AND PROJECTION-TYPE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a high reliable substrate without the formation of a projection on the surface of an electrode though the tip of a probe is brought into contact with the pad electrode as an external terminal at the time of probe inspection by constituting the electrode as the terminal by means of a conductive transparent electrode film which constitutes a picture element electrode. SOLUTION: The pad electrode as the external terminal is constituted of the conductive transparent electrode film such as an ITO film which constitutes the picture element electrode. The pad electrode is provided with double structure where the second pad electrode 26 consisting of the ITS film is formed on the first pad electrode 22 consisting of a polysilicon layer. The second pad electrode 26 is constituted of the ITO film being the same as that which constitutes the picture element electrode 6a. One end of a wiring layer 23 consisting of an aluminum layer is connected to the first pad electrode 22 by a contact hole 25 which is formed in a first inter-layer insulating film 13. Thus, the projection is not easily generated on the surface of the electrode through the probe is brought into contact at the time of pannel inspection using the probe.