发明名称 RADIATION SENSITIVE RESIN COMPOSITION
摘要 <p>PROBLEM TO BE SOLVED: To provide a radiation sensitive resin compsn. having superior sensitivity and pattern shape, excellent in adhesion especially to a gold coated substrate and suitable for use as a material for forming a circuit board, especially for forming a gold bumper. SOLUTION: This radiation sensitive compsn. contains an alkali-soluble copolymer consisting of 10-40wt.% radical polymerizable compd. having a carboxyl group, 20-70wt.% radical polymerizable compd. having a cycloalkyl group and no carboxyl group and 5-60wt.% other radical polymerizable compds. including at least a compd. represented by the formula, a compd. having at least one ethylenic unsatd. double bond and a radiation radical polymn. initiator.</p>
申请公布号 JPH10161307(A) 申请公布日期 1998.06.19
申请号 JP19960338982 申请日期 1996.12.04
申请人 JSR CORP 发明人 OTA TOSHIYUKI;SANO KIMIYASU;MICHINO YOSHIYUKI;SATO HOZUMI
分类号 G03F7/027;C08F2/48;C08F265/06;G03F7/038;H01L21/027;H01L21/60;H05K3/06;(IPC1-7):G03F7/027 主分类号 G03F7/027
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