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发明名称
METHOD AND APPARATUS FOR SPUTTERING MAGNETIC TARGET MATERIALS
摘要
申请公布号
EP0724652(B1)
申请公布日期
2003.10.01
申请号
EP19950910064
申请日期
1994.10.21
申请人
MANLEY, KELLY
发明人
MANLEY,BARRY
分类号
H01L21/203;H05H1/46;C23C14/35;H01J37/34;(IPC1-7):C23C14/34
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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