发明名称 |
METHOD FOR FORMING FILM BODY, DEVICE FOR FORMING FILM BODY, METHOD FOR MANUFACTURING LENS USING THIS, METHOD FOR MANUFACTURING COLOR FILTER AND METHOD FOR ORGANIC EL DEVICE |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for forming a film body sufficiently controlling a film thickness without varying a delivery amount of a liquid drop from respective delivery nozzles; and a device for forming a film body. <P>SOLUTION: In the method for forming a film body, a function liquid introduced while a function liquid drop delivery head 9 is relatively scanned against a workpiece W is delivered from a plurality of delivery nozzles 29a of the function liquid drop delivery head 9 to form the film body of the function liquid on a surface of the workpiece W. The surface of the workpiece W is coated with the function liquid by varying an inclination angle against the scanning direction of the function liquid drop delivery head 9 in the state that a delivery amount of the liquid drop from the respective delivery nozzles 29a cannot be varied. <P>COPYRIGHT: (C)2003,JPO</p> |
申请公布号 |
JP2003275636(A) |
申请公布日期 |
2003.09.30 |
申请号 |
JP20020083096 |
申请日期 |
2002.03.25 |
申请人 |
SEIKO EPSON CORP |
发明人 |
IWATA YUJI |
分类号 |
G02C7/02;B05B1/14;B05B13/02;G02B5/20;H01L51/50;H05B33/10;H05B33/14;(IPC1-7):B05B13/02 |
主分类号 |
G02C7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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