| 摘要 |
PROBLEM TO BE SOLVED: To manufacture high-purity ultrapure water easily. SOLUTION: A cylindrical buffer tank 15 arranged in an ultrapure water manufacturing apparatus 1 is formed by using polyvinyl chloride, or the like so that the tank 15 has 1/12 to 1/20 d/h ratio (wherein (d) is the diameter of a tank body 19 of the tank 15; (h) is the height from the bottom face of the tank body 19 to an overflow pipe 21). The pipe 21 is arranged in the upper part of the tank body 19, and an inlet pipe 20 and an outlet pipe 22 are arranged in the lower part of the tank body 19. Since the tank 15 of the apparatus 1 secures necessary mechanical strengths and is formed into a shape as slender as possible, the surface area of the water in the tank 15 which is to be treated and is exposed to the atmosphere can be made so small that the dissolution of oxygen gas and gaseous carbon dioxide into the water to be treated can be kept to the minimum. Therefore, high-purity ultrapure water can be manufactured easily by such a simple structure. COPYRIGHT: (C)2003,JPO
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