| 摘要 |
A dry cleaning device which uses a double-cylinder type dielectric barrier discharge lamp 10a, 10b as a ultraviolet source. An outside electrode 2 in a trough-like shape is tightly contacted with the outer tube 1a of a discharge container 1, reflecting the ultraviolet light and directs it toward a workpiece 40. A cover 3 covers the outside electrode 2 for insulation of the outside electrode 2 from the ozone. In the clearance between the outer tube 1a of the discharge container 1 and an N2 introduction tube, an inside electrode 6 in a net-like shape is accommodated, nitrogen (N2) gas is caused to flow through the clearance for cooling the lamp 10a, 10b.
|
