| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide cordless air tweezers that is easy to use and versatile and can reliably and stably suck and hold a large bore semiconductor wafer or the like. <P>SOLUTION: One end of a pipe 4 is connected to a replaceable grip 2 with a holding stabilizing portion 1. A vacuum release button 3 is arranged at the connection between the grip 2 and the pipe 4. A replaceable suction part 5 is connected to the other end of the pipe 4. The suction part 5 has an appropriate number of suction holes 6. <P>COPYRIGHT: (C)2003,JPO</p> |
