| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that a high ejection efficiency cannot be attained at a low cost. SOLUTION: A second substrate 2 facing a diaphragm 10 through a spacer member 12 is bonded to a first substrate 1 through a spacer member 12 and a space 13 is formed between the first substrate 1 and the second substrate 2. In the space 13, electrodes 14a and 14b each having a conductive structure for generating an electrostatic attraction in the direction substantially parallel with a diaphragm 10 are provided, respectively, on the diaphragm 10 side and the second substrate 2 side. COPYRIGHT: (C)2003,JPO
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