Defect inspection data processing system

摘要

A defect inspection data processing system includes a client computer having an image pickup section for picking up a two-dimensional image of a to-be-inspected object to be processed in a manufacturing process, and a data transfer section for transferring data indicative of the image picked by the image pickup section. A database stores image data transferred from the client computer. The system also includes a host computer having a defect extraction section for extracting defect information from the image data stored in the database, and a good/bad judgment section for judging whether or not the to-be-inspected object is good, on the basis of the defect information extracted by the defect extraction section. The client computer is separate from the host computer and connected thereto via a communication line.