发明名称 Image-based inspection system including positioning compensation for non-planar targets
摘要 A image-based system for inspecting objects utilizes an imaging chain that defines a focal plane, a manipulator for translating and rotating either the object under inspection or the imaging chain, a surface mapping system that generates a representation of the surface of the object under inspection, and a controller that uses the representation of the surface of the object to control the manipulator so that a portion of the object under inspection lies within the focal plane of the imaging chain.
申请公布号 US6628746(B2) 申请公布日期 2003.09.30
申请号 US20010021383 申请日期 2001.10.30
申请人 AGILENT TECHNOLOGIES, INC. 发明人 EPPLER BARRY;KERSCHNER RONALD K;SHIPLEY MARTIN C.
分类号 G01N21/956;G01N23/04;G03F7/20;(IPC1-7):A61B6/00 主分类号 G01N21/956
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