发明名称 |
Image-based inspection system including positioning compensation for non-planar targets |
摘要 |
A image-based system for inspecting objects utilizes an imaging chain that defines a focal plane, a manipulator for translating and rotating either the object under inspection or the imaging chain, a surface mapping system that generates a representation of the surface of the object under inspection, and a controller that uses the representation of the surface of the object to control the manipulator so that a portion of the object under inspection lies within the focal plane of the imaging chain.
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申请公布号 |
US6628746(B2) |
申请公布日期 |
2003.09.30 |
申请号 |
US20010021383 |
申请日期 |
2001.10.30 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
EPPLER BARRY;KERSCHNER RONALD K;SHIPLEY MARTIN C. |
分类号 |
G01N21/956;G01N23/04;G03F7/20;(IPC1-7):A61B6/00 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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