发明名称
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive resin having high sensitivity, giving a pattern with a high rate of a residual film and excellent in adhesion to a sealing resin by blending specified amts. of a specified polyamide, a photosensitive diazoquinone compd. and a specified phenol compd. SOLUTION: A polyamide is obtd. by allowing 1 mol arom. dicarboxylic acid deriv. represented by formula I to react with 0.6-0.99 mol arom. amiophenol compd. represented by formula II and 0.01-0.4 mol diaminosiloxane represented by formula III in a polar solvent at 10-100 deg.C and 100 pts.wt. of the polyamide is blended with 1-100 pts.wt. photosensitive diazoquinone compd. and 1-50 pts.wt. phenol compd. represented by formula IV to produce the objective positive type photosensitive resin. Since the arom. carboxylic acid deriv. reacts readily with a compd. having an amino group to form an amide compd., the resultant polyamide has a high mol.wt. favorable to the photosensitive resin.
申请公布号 JP3452240(B2) 申请公布日期 2003.09.29
申请号 JP19980206157 申请日期 1998.07.22
申请人 发明人
分类号 G03F7/022;C08G69/42;G03F7/037;G03F7/039;G03F7/075;H01L21/027;(IPC1-7):G03F7/037 主分类号 G03F7/022
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