首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
An improved substrate holder for plasma processing
摘要
申请公布号
AU2003228226(A8)
申请公布日期
2003.09.29
申请号
AU20030228226
申请日期
2003.03.11
申请人
TOKYO ELECTRON LIMITED
发明人
LEE CHEN
分类号
H05H1/46;C23C16/00;H01J37/20;H01L21/00;H01L21/3065;H01L21/31;H01L21/683;H01L21/687;(IPC1-7):C23C16/00;H05H1/02;H01L21/302
主分类号
H05H1/46
代理机构
代理人
主权项
地址
您可能感兴趣的专利
SALT OF OXALIC ACID WITH 5-[4-[2-(N-METHYL-N-(2-PYRIDYL)-AMINO)ETHOXY]BENZYL]THIAZOLIDIN-2,4-DIONE AND A METHOD OF ITS PREPARATION AND ITS USE
Display
FUEL ELEMENT FOR A PRESSURIZED WATER REACTOR
Disc gripping device
Device for indicating the status of an energy source
Support unit
A cooling plant and corresponding thermoconvector
HOT-WATER SUPPLY SYSTEM HAVING SUPPLEMENTARY HEAT EXCHANGER
VARIABLE INTERNET BANNER
A SASH WINDOW WITH A RETRACTABLE PARTING BEAD
Compressing and binding device for elastic member
METHOD FOR THE POLYMERIZATION OF CYCLIC ETHERS
HARNESS TYPE SAFETY BELT
Cooling water channel structure of a cylinder head and method of manufacturing a cylinder head
VIBRATION ALARM DEVICE FOR WARNING A VEHICLE DRIVER
Portable patient monitor with defibrillator/pacemaker interface and battery power management
Locking device of the articulated lever type for clamping workpieces
Device and method for dynamically screwing components, in particular for bearing and transmission assemblies
METHOD AND SYSTEM FOR CONTROLLING WELL CIRCULATION RATE
Device to check locking cover closure in electrical connectors
