| 摘要 |
PURPOSE:To enable a surface treatment by irradiating a wide area by one shot, to enable scanning of a laser beam, to make an oscillation output stable, and to improve the uniformity of the surface treatment by providing a laser beam oscillator with a high output. CONSTITUTION:A laser beam oscillator 11 generating a laser beam 21, for instance, with >=2J/pulse, an attenuator 12 in the optical path of the laser beam 21 generated from the laser beam oscillator 11, a laser beam scanning means 13 scanning the laser beam 21 in the X-y axis direction and a beam homogenizer 14 are successively provided on a surface treatment device 1. Further, a chamber 15 is installed, and a stage 16 on which an object 91 to be worked is loaded, is provided in the chamber 15. Also, a reticle is provided between the beam homogenizer 14 and the chamber 15, and an alignment means and the adjustment means of a laser beam generation output, are provided on the surface treatment device 1. Further, a shutter is installed in the optical path of the laser beam 21. |
