MAPPING APPARATUS OF SEMICONDUCTOR WAFER

摘要

PURPOSE: A mapping apparatus of a semiconductor wafer is provided to be capable of minimizing the damage of the semiconductor wafer by detecting the stored state of the semiconductor wafer in a container using the first sensor. CONSTITUTION: A mapping apparatus of a semiconductor wafer is provided with the first sensor(56) integrated in each slot guide(54) of a container(50) for detecting the stored state of semiconductor wafers(W), a terminal part(62) installed on the upper portion of a loading part(60) for fixedly loading the container at the upper portion of the loading part and simultaneously transmitting current to the first sensor of the container, and a controller(72) installed at the lower portion of the loading part for controlling the semiconductor wafer according to the stored stated of the semiconductor wafer and generating alarm signal when the semiconductor wafer is deviated from the very position.