| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and equipment for treatment of to-be-treated body, which enables a reliable treatment of the body. SOLUTION: In the treating method for the to-be-treated body, there is provided a pattern extending in the direction crossing to tangential direction in the time of treatment of the body. The treating method comprises a process for supplying a treating liquid 120 on the body 100, a process of rotating the body 100 in a positive direction D2 of rotation, and a process of rotating the body 100 in the reverse direction D3. COPYRIGHT: (C)2003,JPO |
