| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode forming method for a surface acoustic wave (SAW) device in which power resistance is improved by suppressing the occurrence of hillocks or voids without any residue when etching an Al alloy film containing metal halides low in vapor pressure. SOLUTION: The electrode forming method for the SAW device has a step for forming the alloy film composed of Al and Mg on a substrate and a step for forming the electrode of the SAW device by selectively etching said alloy film, and the electrode of the SAW device is formed so as to be provided with sidewalls. COPYRIGHT: (C)2003,JPO
|
