| 摘要 |
PURPOSE: A substrate transfer apparatus including a pulley having an improved belt contact structure is provided to be capable of preventing a belt from being deviated out of the pulley by using a 'V' shaped belt groove. CONSTITUTION: A substrate transfer apparatus is provided with a driving motor(31), a driving pulley(33) rotated by the driving motor, a sub-pulley(37) connected with the driving pulley through a belt(35) for being rotated by the rotating force supplied from the driving pulley, a connection bracket(39) installed at the belt, and a transfer arm connected to the bracket for holding a wafer. At this time, each pulley includes the first and second belt groove(33a,37a), respectively, for preventing the deviation of the belt. Preferably, the belt groove is shaped into a 'V' shaped structure.
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