THIN-FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for enabling the upsizing of a substrate and low-cost manufacturing, and a TFT obtained thereby. SOLUTION: The method for manufacturing a thin-film transistor comprises steps of coating a silicon grain layer on the substrate and irradiating the silicon grain with a laser beam. The coating is preferably carried out by printing or an ink jet. A part or the whole of the silicon grain layer is poly-siliconized or can be operated as a channel of the TFT by securing conductivity. COPYRIGHT: (C)2003,JPO