| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for selectively growing a columnar carbon structure in which columnar carbon structures such as carbon nano-tubes or the like are selectively grown only at essential portions, and to provide an electronic device. SOLUTION: Catalyst metal 5 is deposited on the whole surface of a substrate 1 where a diffusion-proof film pattern 4 is provided followed by heat treatment so that only the catalyst metal 5 that exists at an area other than the diffusion- proof film pattern 4 is diffused in the depth direction. Subsequently, the columnar carbon structures 6 are selectively grown starting from the catalyst metal 5 which have remained without being diffused on the diffusion-proof film pattern 4. COPYRIGHT: (C)2003,JPO
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