MAGNESIUM OXIDE FILM FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a magnesium oxide film forming device to make film formation by raising a substrate, whereby a film formation to a plasma display panel of 63 inches or more can be accomplished. SOLUTION: The magnesium oxide (MgO) film forming device for the plasma display panel is to form a thin film of magnesium oxide on the plasma display panel on the magnetron sputtering system together with a plasma beam or a filament cathode in which the plasma density is heightened between a target and the substrate so as to enhance the film formation rate. COPYRIGHT: (C)2003,JPO