| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a transparent dielectric oxide film of an arbitrary shape without performing heat treatment at high temperatures after forming a film by improving a conventional high concentration sol-gel process. SOLUTION: A precursor solution contains metallic ions consisting of a dielectric oxide. The manufacturing method includes a process for preparing a precursor solution of a precursor concentration from almost saturation to super saturation, a process for producing transparent sol solution by hydrolysis at temperatures lower than the temperatures at which the solution gels by hydrolysis and a subsequent condensation polymerization, a process for forming a gel film equivalent to the composition of dissolved substance of the sol solution at a cathode side electrode by applying voltage to a pair of electrode soaked in the sol solution, and a process for forming the oxide film by performing heat treatment to the gel film. COPYRIGHT: (C)2003,JPO
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