| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a solar cell comprising a multilayer film cell which requires no mask alignment each time nor atmosphere releasing, whereas, in a method for manufacturing a solar cell comprising a multilayer thin film cell, a plurality of times of masking and film-forming operation thereafter are required with a different mask required to be accurately aligned each time, atmosphere releasing is required each time for taking in/out an object to be processed, and multiple times of exhausting of a film forming chamber and scavenging management for a next film forming process are laborious. <P>SOLUTION: A multilayer thin film pattern formation mask 15 is held against, with a fixed interval, a base 1 forming a multilayer thin film cell, on which material vapor beam of direct-advancing is made incident alternately at a different and appropriate angle for each material. Thus, wanted multilayer thin film patterns 4, 7, 9, 11, and 14 are formed. The above operations are performed as inline continuous process. <P>COPYRIGHT: (C)2003,JPO</p> |
