| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electrostatic chuck in which dielectric breakdown hardly occurs. <P>SOLUTION: Two pole comb-shape electrodes are formed on the surface of a compact glass substrate and coated with a dielectric layer. The dielectric layer is preferably applied at a low temperature not causing the softening of the glass substrate. Aerosol deposition, CVD or ion plating can be utilized suitably as a coating means. More preferably, the dielectric layer and the electrodes are formed after the surface of the glass substrate is planarized by grinding and/or polishing. <P>COPYRIGHT: (C)2003,JPO</p> |
