| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain an electrostatic chuck having a uniform and thin dielectric layer unattainable by a conventional green sheet method, and an electrostatic chuck having excellent attraction characteristics. <P>SOLUTION: Two pole comb-shape electrodes are formed on the surface of a substrate planarized by grinding and/or polishing and coated with a dielectric layer by aerosol deposition or the like in order to make thin and uniform the dielectric layer, thus obtaining an electrostatic chuck exhibiting excellent attraction characteristics at a lower voltage. <P>COPYRIGHT: (C)2003,JPO</p> |
