| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat sink of long life that stably cools a heating element to be cooled even after used over a long period, and a semiconductor laser device and a semiconductor laser stack device using it. SOLUTION: A heat sink 10a is constituted of a first flat-plate-like member 12 having a groove on the top surface thereof, a second flat-plate-like member 16 having a groove on the bottom surface thereof, and a partition plate 14 placed between the top surface of the member 12 and the bottom surface of the member 16. In the sink 10a, a cooling channel comprising an inflow channel 40 through which cooling water for cooling the heating element placed in the specified region of the outer wall surface of the member 12 is supplied, and an outflow channel 42 through which the cooling water is made to flow out is formed. On the inner wall surface of the cooling channel, a contact preventing layer 300 that prevents the surface from getting contact with a fluid is formed. The preventing layer 300 comprises a first layer 100 that gets contact with the fluid and a second layer 200 placed between the layer 100 and the inner wall surface. The layer 100 is composed of Au, an Au alloy, Ag or an Ag alloy as a main component, and the layer 200 is composed of Ni, Mo, W or Ti as a main component. COPYRIGHT: (C)2003,JPO |
