| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a ceramic multi-layer substrate by solving the problem that a burnt substrate dimension precision is deteriorated, and characteristics fluctuate due to change of extension of a green sheet for the substrate during lamination and thickness of the green sheet for the substrate in the direction of lamination. <P>SOLUTION: A plurality of the green sheets 1 for a substrate made of ceramic on which a conductor pattern 4 is formed, and two sheets 2 for constraint made of materials which are not sintered at a sintering temperature of the green sheets 1 for the substrate on at least one of which the conductor pattern 5 is formed, are laminated so that the sheets 2 for constraint can be brought into contact with the both external sides of the laminated parts of the green sheets 1 for the substrate, and pressurized and integrated so that a composite laminate 6 can be formed. The composite laminate 6 is pressurized so that a pressurized composite laminate 7 can be formed, and the pressurized composite laminate 7 is burnt under the temperature condition of not less than the sintering temperature of the green sheets 1 for the substrate and not more than the sintering temperature of the sheets 2 for constraint, and the both side sheets 2 for constraint are removed from a burnt and thermally treated composite laminate 8 so that a multi-layer substrate 10 can be obtained. <P>COPYRIGHT: (C)2003,JPO |
