| 摘要 |
PROBLEM TO BE SOLVED: To obtain a stamper on which a sharp rugged pattern is formed and to manufacture an information medium of high precision by using the stamper. SOLUTION: A light absorbing layer 103 and a photoresist layer 104 are formed on a substrate 102, a latent image is formed in the photoresist layer 104 and then is developed to form the rugged pattern 106. Thus a photoresist master disk 100 is manufactured and further a Ni thin film 108 is formed on the rugged pattern 106 in the photoresist master disk 100 by electroless plating, a Ni film 110 is formed on the Ni thin film 108 and then the Ni thin film 108 and the Ni film 110 are exfoliated from the photoresist master disk 100 to form the stamper 120. In this method for manufacturing the stamper, a metallic catalyst is imparted onto a surface of the rugged pattern 106 as pretreatment of a process for forming the Ni thin film 108 on the photoresist layer 104, the metallic catalyst is activated and the surface of the rugged pattern 106 on which the metallic catalyst is imparted is washed with ultrapure water or the like. COPYRIGHT: (C)2003,JPO
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