| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a stamper capable of correcting a bent of a substrate without touching on the surface of the substrate. SOLUTION: In the manufacturing method of a stamper where a photo resist is coated on a substrate 301, after the coated photo resist is exposed and developed, the substrate is etched to produce the stamper, steps before coating the photo resist include: a step of coating an adhesive 302 onto a base 303 on which the surface is flat; a step of placing the substrate 301 on the base 302 on which the adhesive is coated; and a step of applying 304 a magnetic field to the base and the substrate to attract the substrate toward the base. COPYRIGHT: (C)2003,JPO
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