ELECTRONIC COMPONENT, MANUFACTURING METHOD FOR THE SAME, FILTER, DUPLEXER AND ELECTRONIC COMMUNICATION APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To manufacture an electronic component having a piezoelectric thin film that exhibits excellent piezoelectric characteristics.

SOLUTION: The manufacturing method has a process for providing a lower electrode 14 and a dummy electrode 24 conducted therewith on a substrate 10 and a process for providing a piezoelectric thin film 16 on the substrate 10 while applying a predetermined bias potential to the lower electrode 14 via the dummy electrode 24. In this method, the potential of the lower electrode 14 is stabilized and the piezoelectric thin film 16 is formed on the electrode to decrease the surface roughness of the piezoelectric thin film. It is thus possible to manufacture the electronic component that exhibits the excellent piezoelectric characteristics in which the electromechanical coupling coefficient and the quality coefficient of a resonator are increased.

COPYRIGHT: (C)2003,JPO