MASTER CARRIER FOR MAGNETIC TRANSFER

摘要

PROBLEM TO BE SOLVED: To obtain a master carrier for magnetic transfer having high reliability and high accuracy. SOLUTION: A resist 12 for electron beam description is provided on a silicon disk 11 and parts corresponding to respective frames on the perimeter are exposed while the disk 11 is rotated by using an electron beam EB modulated in correspondence with a servo signal. The resist 12 is developed and exposed parts are removed to form a rugged shape of the resist 12. A Ni conductive film 13a is formed on the surface of the rugged shape and then a thin Ni plated layer 13b is formed by electroforming to form a Ni layer 13. The rugged surface of the Ni layer 13 formed by peeling the Ni layer 13 from the disk 11 is washed after the resist 12 left there are removed and the rugged surface is subjected to oxidation treatment to form a first Ni substrate. A Ni layer 23 is formed on the first substrate by electroforming and the Ni layer 23 is peeled from the first substrate. A soft magnetic layer 25 is formed on the Ni layer 23 to form the master carrier 3A. COPYRIGHT: (C)2003,JPO