| 摘要 |
PROBLEM TO BE SOLVED: To simply realize a nearly ideal hyperbolic cross-section electrode or a theoretical curvilinear cross-section electrode at a low cost without increasing the size thereof, and to restrain electric field variation due to thermal expansion. SOLUTION: Four rods 6, 7, 8 and 9 having a predetermined cross-sectional shape are disposed at circumferentially equal intervals, and four conductive thin plates 10, 11, 12 and 13 having elasticity are each bent into a predetermined shape by bringing their center parts into contact with the corresponding rods 6, 7, 8 and 9. Four insulating support members 14, 15, 16 and 17 respectively support the facing edge parts of the adjacent thin plates 10, 11, 12 and 13 by being interlaid between the facing edge parts. Electrode surfaces are formed by the thin plates 10, 11, 12 and 13. Thereby, the electrode having a curvilinear cross-section as analogous to a right-angled hyperbolic cross-section or theoretical curvilinear cross-section as possible can be simply and accurately formed. COPYRIGHT: (C)2003,JPO
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