| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure of a ceramic heater by which, generation of hot spots at the peripheral part of the end of a resistance heating element is prevented. SOLUTION: The ceramic heater made of ceramics comprises a substrate on which, an object to be heated is put, a resistance heating element 3B embedded in the substrate, and a jointing member 6 electrically connected to an end 3a of the resistance heating element 3B. The jointing member 6, formed into almost spherical shape, spheroidal shape, or cylindrical shape, has a fixing part 6a fixing the end 3a of the resistance heating element 3 by caulking. COPYRIGHT: (C)2003,JPO
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