LINEAR EVAPORATION SOURCE FOR FABRICATING ORGANIC SEMICONDUCTOR DEVICE
摘要
PURPOSE: A linear evaporation source for fabricating an organic semiconductor device is provided to deposit uniformly a thin film and improve a shadow effect due to a shadow mask by using a crucible having an opening portion. CONSTITUTION: A linear evaporation source for fabricating an organic semiconductor device includes a crucible(10) in order to fabricate a thin film of an organic semiconductor device by heating a deposition material. The crucible(10) has a shape of long barrel. An opening portion(11) is formed to a longitudinal direction of an upper side of the crucible(10). The width of a center portion of the opening portion(11) is narrower than the width of both ends of the opening portion(11). The thin film is deposited by moving a substrate or the crucible(10) vertically to the longitudinal direction of the upper side of the crucible(10).
申请公布号
KR20030075461(A)
申请公布日期
2003.09.26
申请号
KR20020014703
申请日期
2002.03.19
申请人
INNOVEX. INC.;JEONG, KWANG HO
发明人
CHOI, MYEONG UN;JEONG, KWANG HO;KIM, SIN CHEOL;LEE, JAE GYEONG;MYUNG, NO HUN;SUNG, MYEON CHANG