MANUFACTURING DEVICE AND MANUFACTURING METHOD USING THE SAME FOR POLYCRYSTALLINE SEMICONDUCTOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing device for a polycrystalline semiconductor substrate where a crystalline semiconductor substrate having excellent crystal quality and a uniform thickness can be manufactured without increasing its manufacturing cost. SOLUTION: The manufacturing device for a polycrystalline semiconductor substrate is provided with a crucible which has an opening at its top and houses a semiconductor material and provided with a base body which vertically moves in and out through the opening of the crucible and besides can rotate around its axis. The crucible has a heating source for melting the semiconductor material housed, and the base body has an adhesion part to which the semiconductor material in a molten state is adhered when the base body is lowered into the crucible. COPYRIGHT: (C)2003,JPO