发明名称 |
Monochromatic vacuum ultraviolet light source for photolithography applications based on a high-pressure microhollow cathode discharge |
摘要 |
A light source with a sealed, light-transmissive tube filled with high pressure gases or high pressure gas mixtures and a microhollow cathode (MHC) discharge capable of excimer production are provided.
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申请公布号 |
US2003178928(A1) |
申请公布日期 |
2003.09.25 |
申请号 |
US20010876238 |
申请日期 |
2001.06.07 |
申请人 |
BECKER KURT F.;KURUNCZI PETER F.;SCHOENBACH KARL H. |
发明人 |
BECKER KURT F.;KURUNCZI PETER F.;SCHOENBACH KARL H. |
分类号 |
H01J61/09;H01J61/16;(IPC1-7):H01J1/00 |
主分类号 |
H01J61/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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