发明名称 |
Process for producing dielectric layers by using multifunctional carbosilanes |
摘要 |
A process for producing dielectric layers with low dielectric constants by thermal treatment of a sol-gel product of a multifunctional carbosilane, corresponding layers, and their use in the production of electronic components, are described.
|
申请公布号 |
US2003181537(A1) |
申请公布日期 |
2003.09.25 |
申请号 |
US20020319121 |
申请日期 |
2002.12.13 |
申请人 |
KIRCHMEYER STEPHAN;GAISER DETLEF;KRAUS HARALD;MERKER UDO |
发明人 |
KIRCHMEYER STEPHAN;GAISER DETLEF;KRAUS HARALD;MERKER UDO |
分类号 |
H05K1/03;C09D5/25;H01L21/312;H01L21/316;H01L21/768;H01L23/498;H01L23/532;H05K1/00;H05K3/46;(IPC1-7):C08J9/00 |
主分类号 |
H05K1/03 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|