发明名称 Method and device for determining the vectorial distance between the capillary and the image recognition system of a wire bonder
摘要 To determine the vectorial distance D between the tip of a capillary and an optical axis of an image recognition system of a Wire Bonder, a glass fibre supplied with light is used as a reference point and as a sensor. On the one hand, the glass fibre serves as a reference point with which the position of the optical axis of the image recognition system can be determined. On the other hand, the glass fibre serves as a sensor with which the position of the tip of the capillary can be determined in that it is determined at which position of the bondhead the intensity of the light which is reflected back into the glass fibre by a wire ball formed at the tip of the capillary is at a maximum.
申请公布号 US2003178469(A1) 申请公布日期 2003.09.25
申请号 US20030391410 申请日期 2003.03.18
申请人 ESEC TRADING SA 发明人 HESS PETER;MICHLER MARKUS;ONDA NICOLINO
分类号 B23K20/00;B23K20/26;G06T7/00;H01L21/00;H01L21/607;(IPC1-7):B23K31/02 主分类号 B23K20/00
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