发明名称 |
Method and device for determining the vectorial distance between the capillary and the image recognition system of a wire bonder |
摘要 |
To determine the vectorial distance D between the tip of a capillary and an optical axis of an image recognition system of a Wire Bonder, a glass fibre supplied with light is used as a reference point and as a sensor. On the one hand, the glass fibre serves as a reference point with which the position of the optical axis of the image recognition system can be determined. On the other hand, the glass fibre serves as a sensor with which the position of the tip of the capillary can be determined in that it is determined at which position of the bondhead the intensity of the light which is reflected back into the glass fibre by a wire ball formed at the tip of the capillary is at a maximum. |
申请公布号 |
US2003178469(A1) |
申请公布日期 |
2003.09.25 |
申请号 |
US20030391410 |
申请日期 |
2003.03.18 |
申请人 |
ESEC TRADING SA |
发明人 |
HESS PETER;MICHLER MARKUS;ONDA NICOLINO |
分类号 |
B23K20/00;B23K20/26;G06T7/00;H01L21/00;H01L21/607;(IPC1-7):B23K31/02 |
主分类号 |
B23K20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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