发明名称 |
Manufacturing system, manufacturing method, method of operating a manufacturing apparatus, and light emitting device |
摘要 |
A manufacturing system capable of enhancing reliability and luminance of a light emitting element is provided which uses an EL material of very high purity in evaporation. The system is also capable of using an EL material efficiently. Instead of a glass jar, a container (first container 11a) to be set in an evaporation apparatus is employed and a material maker (18) stores an EL material (12), or refines it by sublimation and stores, directly in the container. The container is then transferred to a light emitting device maker (19) for evaporation. With a manufacturing system as such, impurities are prevented from contaminating a highly pure EL material. This system also eliminates the trouble of transferring an EL material from a glass jar to a container. The container may be recovered by the material maker and the EL material remaining in the container may be collected for reuse by the manufacturing system. |
申请公布号 |
US2003180457(A1) |
申请公布日期 |
2003.09.25 |
申请号 |
US20030356722 |
申请日期 |
2003.02.03 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
MURAKAMI MASAKAZU;OHTANI HISASHI;YAMAZAKI SHUNPEI;KUWABARA HIDEAKI |
分类号 |
C23C14/12;C23C14/24;C23C14/56;H01L51/00;H01L51/30;H01L51/40;H01L51/56;(IPC1-7):B05D7/22;C23C16/00 |
主分类号 |
C23C14/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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