发明名称 SURFACE AREA DEPOSITION TRAP
摘要 The disclosed pressure transducer assembly includes a housing, a pressure sensor disposed within the housing, a coupling establishing a sealed pathway between the housing and an external source of gas or fluid, and a deposition trap disposed in the pathway. The deposition trap provides a plurality of channels, each of the channels being narrower than the pathway.
申请公布号 WO03078952(A2) 申请公布日期 2003.09.25
申请号 WO2003US06467 申请日期 2003.03.04
申请人 MKS INSTRUMENTS, INC. 发明人 TRAVERSO, ROBERT
分类号 G01L19/00;G01L19/06 主分类号 G01L19/00
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