| 摘要 |
<P>PROBLEM TO BE SOLVED: To produce, in a high yield and high productivity, an aluminum nitride sintered compact having a bending strength of 400 MPa or higher and a thermal conductivity coefficient of 150 W/mK or higher without imparting thermal shock or controlling a crystal grain size and a particle size distribution. <P>SOLUTION: The production method comprises preparing a formed body including an aluminum nitride powder, a sintering aid comprising a rare earth compound, and an organic binder comprising an acrylic resin, degreasing the formed body under such a condition that a residual carbon becomes 2.0 mass%, and then quickly heating the degreased body at a temperature elevation speed of 10°C/min or higher after exceeding 1,500°C. In this case, it is preferable that the proportions of the aluminum nitride powder and the sintering aid being the rare earth compound in the formed body are 0.1-5 pts.wt. alumina and 1-10 pts.wt. rare earth compound in terms of oxide, respectively based on 100 pts.wt. aluminum nitride powder having an average particle size of 3 μm or less and an oxygen content of 2% or less. Further, it is preferable to continuously perform the degreasing and firing processes. <P>COPYRIGHT: (C)2003,JPO |
