| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a capacity detection type sensor that can prevent a cover film from being broken by discharge, make an ESD electrode corroded hardly, and secure high reliability for a long period and a manufacturing method thereof. <P>SOLUTION: Capacity sensor electrodes 22 are arranged matrix-likely on a semi-conductor substrate 10, and coated with the cover film 23. The each sensor electrode 22 is connected to a driving circuit 11. The each ESD electrode 21 is arranged in the vicinity of a corner part of the each sensor electrode 22. The ESD electrode 21 is constituted, for example, of a film of excellent conductivity using aluminum as a principal component, and a TiN film thereon. The each ESD electrode 21 is grounded via the semi-conductor substrate 10. A plurality of micro-fine ESD holes from the surface of the cover film 23 reaching the ESD electrode 21 are formed on the ESD electrode 21. <P>COPYRIGHT: (C)2003,JPO |
