| 摘要 |
PROBLEM TO BE SOLVED: To quickly and precisely inspect various kinds of components, in an inspection device of a type in which an irradiation means irradiates an inspection subject with a laser beam. SOLUTION: Glass plates 5, 6 varying a scanning locus of the laser beam are provided between the irradiation means 3 and the components 12, 12a-12e, a relative angle in the glass plates 5, 6 is made variable for every size and every kind in each of the components 12, 12a-12e, based on inspection information 19 preliminarily input, to be rotated thereafter, and scanning suitable for the size and a shape of the each of the components 12, 12a-12e mounted on a substrate 11 is realized to attain the purpose of the present invention. COPYRIGHT: (C)2003,JPO
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