| 摘要 |
PROBLEM TO BE SOLVED: To measure the three-dimensional shape of a measuring surface exceeding the measurement area of an interference shape measuring instrument by partially dividing it and to reduce an interlinking error generated in linking them together. SOLUTION: This device is provided with a measuring instrument 105 for dividing the measuring surface having a three-dimensional shape into a plurality of regions to measure the shape of the measuring surface for each of the plurality of divided regions, and attitude measuring instruments 106A-106C for obtaining the attitude of the measuring surface by measuring the positions of three or more points on the measuring surface. The measurement values of the respective ones of the plurality of regions are linked together by using a first correction amount based on the measurement values obtained by the attitude measuring instrument. COPYRIGHT: (C)2003,JPO
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