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发明名称
PROCEDIMANTO PER IL TRATTAMENTO AD UMIDO CON ACIDI DI DISCHI A SEMICONDUTTORI
摘要
申请公布号
ITMI990120(A1)
申请公布日期
2000.07.24
申请号
IT1999MI00120
申请日期
1999.01.22
申请人
SEZ SEMICONDUCTOR-EQUIPMENT ZUBEHOR FUR DIE HALBEITERFERTIGUNG AG
发明人
SUMNITSCH FRANZ;WAGNER GERALD
分类号
H01L21/308;H01L21/311
主分类号
H01L21/308
代理机构
代理人
主权项
地址
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