| 摘要 |
<p>The present invention contemplates an integrated oscillator-amplifier system (100) for deep UV generation. The system (100) employs a long cavity oscillator to lengthen the pulse build-up time and to control the pulse spectral bandwidth. Meanwhile the system employs a short cavity amplifier to shorten the energy extraction time to produce a single short pulse with good energy extraction efficiency. The system further integrates the oscillator and the amplifier by inserting the amplifier inside the oscillator cavity (101-105) via a mirror (103) of low reflectivity. As a result, the integrated system has a long build-up time to generate a short amplified single pulse in the short cavity. Consequently, the integrated system can accommodate a relatively long pump pulse to produce a shingle short amplified suitable for deep UV laser generation.</p> |
