| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize inexpensively an X-ray measurement device for accurately measuring the distance between two points on an image by executing a geometric expansion characterized by that an X-ray generator is a point X-ray source and by using a clear X-ray transmission image. <P>SOLUTION: In relation to a deviation of the actual distance between two points from that on the X-ray transmission image which deviation is caused by the fact that the positions of the two points of a measurement object in a sample imaged by an imaging part comprising an X-ray generation part, an image intensifier, a lens system and a TV camera system are located on different surfaces in the thickness direction of the sample, the deviation is corrected by giving the distance in the thickness direction between the two points. <P>COPYRIGHT: (C)2003,JPO |
