| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement method of a three-dimensional surface shape capable of rapid and accurate measurement. SOLUTION: A measurement object surface 2 is scanned with a linear slit beam 3a, and a parameter indicating a projecting position is measured. The image of the slit beam 3a on the surface of the measurement object 2 is photographed at an angle different from the projecting direction of the slit beam, the values of the parameter when the intensity of the sequentially memorized images of the slit beam 3a is maximized are determined with respect to the respective pixels, and set as the values of the respective pixels by an image compositing means 12. Based on the values of the respective pixels, the three-dimensional surface shape of the measurement object surface is obtained. At that time, the value of the parameter when the intensity of the sequentially memorized images of the slit beam 3a is maximized is found by an interpolation method on the basis of the intensity of the sequentially memorized images of the slit beam 3a and the value of the parameter at that time. COPYRIGHT: (C)2003,JPO
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