| 摘要 |
PROBLEM TO BE SOLVED: To provide a buffer tank, which enables first-in first-out of a liquid material, and stores the liquid material with almost no generated or mixed air bubble and keeps supplying the liquid material to a subsequent process. SOLUTION: The buffer tank 1A has a bottom 8 on which an intake 2 and an outlet 3 for the liquid material are formed. In the inner space of the tank 1A, a partition panel 4 with a plurality of drilled holes 7 is set upright on the bottom 8 so as to isolate the intake 2 from the outlet 3, where the top 6 of the partition panel 4 is set lower than an inner ceiling surface 5' of a tank lid 5. COPYRIGHT: (C)2003,JPO
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