发明名称 PIEZOELECTRIC ACTUATOR AND FLUID INJECTION HEAD HAVING THE SAME
摘要 A first common electrode fixed to a predetermined potential is formed on a vibration plate. A first piezoelectric layer having a first thickness is arranged on the first common electrode. A drive electrode supplied with a drive signal from outside is arranged on the first piezoelectric layer. A second piezoelectric layer having a second thickness greater than the first thickness is arranged on the drive electrode. A second common electrode fixed to the predetermined potential is arranged on the second piezoelectric layer.
申请公布号 WO03078166(A1) 申请公布日期 2003.09.25
申请号 WO2003JP03153 申请日期 2003.03.17
申请人 SEIKO EPSON CORPORATION;CHANG, JUNHUA;KATAKURA, TAKAHIRO 发明人 CHANG, JUNHUA;KATAKURA, TAKAHIRO
分类号 B41J2/045;B41J2/055;B41J2/14;B41J2/16;F04B43/04;H01L41/083;H01L41/09;(IPC1-7):B41J2/045 主分类号 B41J2/045
代理机构 代理人
主权项
地址