发明名称 |
PIEZOELECTRIC ACTUATOR AND FLUID INJECTION HEAD HAVING THE SAME |
摘要 |
A first common electrode fixed to a predetermined potential is formed on a vibration plate. A first piezoelectric layer having a first thickness is arranged on the first common electrode. A drive electrode supplied with a drive signal from outside is arranged on the first piezoelectric layer. A second piezoelectric layer having a second thickness greater than the first thickness is arranged on the drive electrode. A second common electrode fixed to the predetermined potential is arranged on the second piezoelectric layer.
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申请公布号 |
WO03078166(A1) |
申请公布日期 |
2003.09.25 |
申请号 |
WO2003JP03153 |
申请日期 |
2003.03.17 |
申请人 |
SEIKO EPSON CORPORATION;CHANG, JUNHUA;KATAKURA, TAKAHIRO |
发明人 |
CHANG, JUNHUA;KATAKURA, TAKAHIRO |
分类号 |
B41J2/045;B41J2/055;B41J2/14;B41J2/16;F04B43/04;H01L41/083;H01L41/09;(IPC1-7):B41J2/045 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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